Virtual Metrology (VM) and Predictive Maintenance (PM)

The ICMR is engaged in a variety of projects in the areas of Virtual Metrology (VM) and Predictive Maintenance (PM). Current VM/PM research is focused on developing tools and methodologies in support of Dynamic Sampling strategies and Equipment Life Cycle analysis.  It is expected that these projects will yield significant manufacturing efficiency improvements for our partners.

Virtual Metrology is the ability to infer a critical parameter using data collected from other measurements or sensors.  A mathematical model is then applied to the data and the desired parameter is estimated real-time.  This approach has benefits the following potential benefits:-

• less time is spent conducting non-value add metrology
• less metrology capacity is required
• results can be obtained virtually real-time

Predictive Maintenance is the ability to identify deterioration of a key component by monitoring its behaviour via appropriate sensors and applying mathematical models to the data. This approach has the following potential benefits:-

• indicating the Remaining Useful Life (RUL) of a component of piece of manufacturing equipment, allowing better decision-making and scheduling of activities (e.g. maintenance and WIP management)
• reduction in human intervention as the system monitors and dynamically reacts to changes in equipment/component behaviour